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Journal Articles Nano Letters Year : 2022

Real-Time Sensing with Multiplexed Optomechanical Resonators

Fabrice-Roland Lamberti
Ujwol Palanchoke
  • Function : Author
Thijs Peter Joseph Geurts
Marc Gely
  • Function : Author
Sébastien Regord
  • Function : Author
Louise Banniard
Marc Sansa
Guillaume Jourdan
Sébastien Hentz


Nanoelectromechanical resonators have been successfully used for a variety of sensing applications. Their extreme resolution comes from their small size, which strongly limits their capture area. This leads to a long analysis time and the requirement for large sample quantity. Moreover, the efficiency of the electrical transductions commonly used for silicon resonators degrades with increasing frequency, limiting the achievable mechanical bandwidth and throughput. Multiplexing a large number of high-frequency resonators appears to be a solution, but this is complex with electrical transductions. We propose here a route to solve these issues, with a multiplexing scheme for very high-frequency optomechanical resonators. We demonstrate the simultaneous frequency measurement of three silicon microdisks fabricated with a 200 mm wafer large-scale process. The readout architecture is simple and does not degrade the sensing resolutions. This paves the way toward the realization of sensors for multiparametric analysis with an extremely low limit of detection and response time.

Dates and versions

hal-03669313 , version 1 (16-05-2022)



Fabrice-Roland Lamberti, Ujwol Palanchoke, Thijs Peter Joseph Geurts, Marc Gely, Sébastien Regord, et al.. Real-Time Sensing with Multiplexed Optomechanical Resonators. Nano Letters, 2022, 22 (5), pp.1866-1873. ⟨10.1021/acs.nanolett.1c04017⟩. ⟨hal-03669313⟩
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